Inventor

BLUCK TERRY

US53 patents

⚠️ This page may combine multiple inventors who share the name “BLUCK TERRY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BLUCK TERRY

INTEVAC INC

Disk coating system

System and method for commercial fabrication of patterned media

Apparatus and methods for transporting and processing substrates

Processing thin wafers

Methods and apparatus for processing insulating substrates

Processing systems with dual ion sources

Plasma processing system and method

Substrate processing system

Dual-mask arrangement for solar cell fabrication

Substrate processing system and method

System architecture for combined static and pass-by processing

Narrow source for physical vapor deposition processing

Method for optimized removal of wafer from electrostatic chuck

Wafer plate and mask arrangement for substrate fabrication

Implant masking and alignment system with rollers

System architecture for vacuum processing

Substrate processing system and method

System architecture for vacuum processing

System and method for bi-facial processing of substrates

Creation of distributed voids in thin films

Ion implantation for modification of thin film coatings on glass

System for forming nano-laminate optical coating

System for forming nano-laminate optical coating

High throughput load lock for solar wafers

Hybrid system architecture for thin film deposition

System with dual-motion substrate carriers

Optical coating having nano-laminate for improved durability

Ion implantation for modification of thin film coatings on glass

Multi-piece substrate holder and alignment mechanism

Processing thin wafers

Patterned chuck for substrate processing

Multi-colored dielectric coating

System architecture for combined static and pass-by processing

System of height and alignment rollers for precise alignment of wafers for ion implantation

Cylindrical cathode and chamber using same for sputtering

BLUCK TERRY

Apparatus and methods for transporting and processing substrates

Apparatus and methods for transporting and processing substrates

Apparatus and methods for transporting and processing substrates

Processing thin wafers

Evaporative system for solar cell fabrication

BARNES MICHAEL S

System and method for dual-sided sputter etch of substrates

System and method for processing substrates with detachable mask

System and method for dual-sided sputter etch of substrates

HOEY GEE SUN

Linear vacuum robot with Z motion and articulated arm

Linear vacuum robot with z motion and articulated arm

(unassigned)

Plasma processing system and method

BROOKS AUTOMATION INC

Linear vacuum robot with Z motion and articulated arm

BERGER ALEXANDER J

Method and apparatus for masking solar cell substrates for deposition

SCOLLAY STUART

System and method for substrate transport

WALL ARTHUR C

Method of and apparatus utilizing carbon cord for evaporation of metals