Inventor
DUKOVIC JOHN O
US15 patents
⚠️ This page may combine multiple inventors who share the name “DUKOVIC JOHN O”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS7704352B2Apr 27, 2010
High-aspect ratio anode and apparatus for high-speed electroplating on a solar cell substrate
APPLIED MATERIALS INC24 citations92
US7214297B2May 8, 2007
Substrate support element for an electrochemical plating cell
APPLIED MATERIALS INC30 citations92
US11815816B2Nov 14, 2023
Apparatus for post exposure bake of photoresist
APPLIED MATERIALS INC2 citations73
US11049537B2Jun 29, 2021
Additive patterning of semiconductor film stacks
APPLIED MATERIALS INC2 citations71
US11934103B2Mar 19, 2024
Apparatus for post exposure bake of photoresist
APPLIED MATERIALS INC0 citations62
US11018223B2May 25, 2021
Methods for forming device isolation for semiconductor applications
APPLIED MATERIALS INC0 citations62
US11798606B2Oct 24, 2023
Additive patterning of semiconductor film stacks
APPLIED MATERIALS INC0 citations61
US7736928B2Jun 15, 2010
Precision printing electroplating through plating mask on a solar cell substrate
APPLIED MATERIALS INC1 citations51
IBM
7 patentsUS6261426B1Jul 17, 2001
Method and apparatus for enhancing the uniformity of electrodeposition or electroetching
IBM77 citations96
US5522975AJun 4, 1996
Electroplating workpiece fixture
IBM144 citations96
US5516412AMay 14, 1996
Vertical paddle plating cell
IBM394 citations96
US5352350AOct 4, 1994
Method for controlling chemical species concentration
IBM75 citations96
US6471845B1Oct 29, 2002
Method of controlling chemical bath composition in a manufacturing environment
IBM63 citations95
US5312532AMay 17, 1994
Multi-compartment eletroplating system
IBM149 citations94
US6685814B2Feb 3, 2004
Method for enhancing the uniformity of electrodeposition or electroetching
IBM37 citations92