Inventor
FUTAKUCHIYA JUN
JP10 patents
⚠️ This page may combine multiple inventors who share the name “FUTAKUCHIYA JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NHK SPRING CO LTD
8 patentsUS7503980B2Mar 17, 2009
Substrate supporting apparatus
NHK SPRING CO LTD527 citations96
US6180931B1Jan 30, 2001
Heater unit for semiconductor processing
NHK SPRING CO LTD32 citations91
US6204486B1Mar 20, 2001
Heater unit for semiconductor processing
NHK SPRING CO LTD17 citations79
US7851728B2Dec 14, 2010
Heater unit
NHK SPRING CO LTD4 citations61
US7045747B2May 16, 2006
Heater unit
NHK SPRING CO LTD5 citations61
US12354901B2Jul 8, 2025
Stage and manufacturing method thereof
NHK SPRING CO LTD0 citations54
US10276410B2Apr 30, 2019
Substrate support device
NHK SPRING CO LTD0 citations36
US10315388B2Jun 11, 2019
Method of manufacturing laminate and laminate
NHK SPRING CO LTD0 citations35