Inventor
NISHIMURA MATSUOMI
JP24 patents
Patents
24 patentsUS6012966AJan 11, 2000
Precision polishing apparatus with detecting means
CANON KK118 citations99
US5370842ADec 6, 1994
Sample measuring device and sample measuring system
CANON KK198 citations99
US6183345B1Feb 6, 2001
Polishing apparatus and method
CANON KK103 citations98
US5788819AAug 4, 1998
Method for driving liquid, and method and apparatus for mixing and agitation employing the method
CANON KK94 citations98
US5495105AFeb 27, 1996
Method and apparatus for particle manipulation, and measuring apparatus utilizing the same
CANON KK135 citations98
US6179695B1Jan 30, 2001
Chemical mechanical polishing apparatus and method
CANON KK72 citations96
US5427959AJun 27, 1995
Apparatus and method for measuring specimen
CANON KK79 citations96
US5171969ADec 15, 1992
Movable film fixing device with heater control responsive to selected sheet size
CANON KK54 citations95
US6352469B1Mar 5, 2002
Polishing apparatus with slurry screening
CANON KK27 citations93
US6162112ADec 19, 2000
Chemical-mechanical polishing apparatus and method
CANON KK42 citations93
US6776691B2Aug 17, 2004
Polishing/cleaning method as well as method of making a wiring section using a polishing apparatus
CANON KK26 citations92
US6332835B1Dec 25, 2001
Polishing apparatus with transfer arm for moving polished object without drying it
CANON KK40 citations92
US6312316B1Nov 6, 2001
Chemical mechanical polishing apparatus and method
CANON KK16 citations92
US6299506B2Oct 9, 2001
Polishing apparatus including holder and polishing head with rotational axis of polishing head offset from rotational axis of holder and method of using
CANON KK31 citations92
US6165050ADec 26, 2000
Method of manufacturing semiconductor device using precision polishing apparatus with detecting means
CANON KK22 citations92
US6149500ANov 21, 2000
Precision polishing method using hermetically sealed chambers
CANON KK18 citations92
US5904611AMay 18, 1999
Precision polishing apparatus
CANON KK20 citations92
US5601983AFeb 11, 1997
Method for specimen measurement
CANON KK34 citations92
US5599502AFeb 4, 1997
Liquid moving apparatus and measuring apparatus utilizing the same
CANON KK46 citations92
US5380490AJan 10, 1995
Apparatus for measuring a test specimen
CANON KK18 citations74
US4960070AOct 2, 1990
Developing apparatus
CANON KK12 citations74
US6629882B2Oct 7, 2003
Precise polishing apparatus and method
CANON KK6 citations73
US6390903B1May 21, 2002
Precise polishing apparatus and method
CANON KK13 citations73
US4168119ASep 18, 1979
Electrophotographic copying apparatus utilizing liquid developer
CANON KK8 citations70