Inventor
UCHIYAMA SHINZO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “UCHIYAMA SHINZO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
8 patentsUS6179695B1Jan 30, 2001
Chemical mechanical polishing apparatus and method
CANON KK72 citations96
US6677549B2Jan 13, 2004
Plasma processing apparatus having permeable window covered with light shielding film
CANON KK21 citations92
US6312316B1Nov 6, 2001
Chemical mechanical polishing apparatus and method
CANON KK16 citations92
US6299506B2Oct 9, 2001
Polishing apparatus including holder and polishing head with rotational axis of polishing head offset from rotational axis of holder and method of using
CANON KK31 citations92
US6629882B2Oct 7, 2003
Precise polishing apparatus and method
CANON KK6 citations73
US6390903B1May 21, 2002
Precise polishing apparatus and method
CANON KK13 citations73
US12138663B2Nov 12, 2024
Sorting apparatus for sorting objects and measurement apparatus
CANON KK0 citations62
US6916678B2Jul 12, 2005
Surface modification method
CANON KK5 citations62