Inventor

YUN JAE-IM

KR2 patents

Patents

2 patents

US6858854B2Feb 22, 2005

Method and apparatus for measuring inclination angle of ion beam

SAMSUNG ELECTRONICS CO LTD22 citations89

US6300642B1Oct 9, 2001

Method for monitoring Faraday cup operation in an ion implantation apparatus

SAMSUNG ELECTRONICS CO LTD16 citations77