Inventor
TOPRAC ANTHONY JOHN
US15 patents
Patents
15 patentsUS6304999B1Oct 16, 2001
Method and apparatus for embedded process control framework in tool systems
ADVANCED MICRO DEVICES INC149 citations99
US6622059B1Sep 16, 2003
Automated process monitoring and analysis system for semiconductor processing
ADVANCED MICRO DEVICES INC101 citations98
US6230069B1May 8, 2001
System and method for controlling the manufacture of discrete parts in semiconductor fabrication using model predictive control
ADVANCED MICRO DEVICES INC162 citations97
US5926690AJul 20, 1999
Run-to-run control process for controlling critical dimensions
ADVANCED MICRO DEVICES INC346 citations97
US6675137B1Jan 6, 2004
Method of data compression using principal components analysis
ADVANCED MICRO DEVICES INC50 citations96
US6582618B1Jun 24, 2003
Method of determining etch endpoint using principal components analysis of optical emission spectra
ADVANCED MICRO DEVICES INC60 citations96
US6988017B2Jan 17, 2006
Adaptive sampling method for improved control in semiconductor manufacturing
ADVANCED MICRO DEVICES INC122 citations95
US6564114B1May 13, 2003
Determining endpoint in etching processes using real-time principal components analysis of optical emission spectra
ADVANCED MICRO DEVICES INC49 citations95
US6238937B1May 29, 2001
Determining endpoint in etching processes using principal components analysis of optical emission spectra with thresholding
ADVANCED MICRO DEVICES INC70 citations95
US6789052B1Sep 7, 2004
Method of using control models for data compression
ADVANCED MICRO DEVICES INC24 citations92
US6419846B1Jul 16, 2002
Determining endpoint in etching processes using principal components analysis of optical emission spectra
ADVANCED MICRO DEVICES INC32 citations92
USRE39518EMar 13, 2007
Run to run control process for controlling critical dimensions
ADVANCED MICRO DEVICES INC19 citations91
US6551751B2Apr 22, 2003
Method and apparatus for controlling a stepper
ADVANCED MICRO DEVICES INC1 citations46
US6440622B1Aug 27, 2002
Method for controlling and monitoring light source intensity
ADVANCED MICRO DEVICES INC1 citations46
US6417912B1Jul 9, 2002
Method and apparatus for controlling optical-parameters in a stepper
ADVANCED MICRO DEVICES INC1 citations46