Inventor
YUSHIO YASUHISA
JP13 patents
⚠️ This page may combine multiple inventors who share the name “YUSHIO YASUHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO ELECTRIC INDUSTRIES
12 patentsUS6423400B1Jul 23, 2002
Susceptor for semiconductor manufacturing equipment and process for producing the same
SUMITOMO ELECTRIC INDUSTRIES29 citations92
US6271163B1Aug 7, 2001
Aluminum nitride sintered body and method of preparing the same
SUMITOMO ELECTRIC INDUSTRIES22 citations92
US4886709ADec 12, 1989
Member for semiconductor apparatus
SUMITOMO ELECTRIC INDUSTRIES38 citations92
US5010388AApr 23, 1991
Connection structure between components for semiconductor apparatus
SUMITOMO ELECTRIC INDUSTRIES36 citations91
US6174614B1Jan 16, 2001
Sintered aluminum nitride body and metallized substrate prepared therefrom
SUMITOMO ELECTRIC INDUSTRIES17 citations84
US6458444B1Oct 1, 2002
Ceramic substrate and polishing method thereof
SUMITOMO ELECTRIC INDUSTRIES9 citations74
US6428741B2Aug 6, 2002
Aluminum nitride sintered body and method of preparing the same
SUMITOMO ELECTRIC INDUSTRIES5 citations74
US6084221AJul 4, 2000
Aluminum nitride heater
SUMITOMO ELECTRIC INDUSTRIES14 citations74
US6294275B1Sep 25, 2001
Aluminum-nitride sintered body, method for fabricating the same, and semiconductor substrate comprising the same
SUMITOMO ELECTRIC INDUSTRIES10 citations70
US6770379B2Aug 3, 2004
Susceptor for semiconductor manufacturing equipment and process for producing the same
SUMITOMO ELECTRIC INDUSTRIES5 citations63
US6500052B2Dec 31, 2002
Method of polishing a ceramic substrate
SUMITOMO ELECTRIC INDUSTRIES3 citations63
US6078027AJun 20, 2000
Ceramic fixing heater containing silicon nitride
SUMITOMO ELECTRIC INDUSTRIES5 citations63