Inventor
KOXXY MARTIN J
US15 patents
Patents
15 patentsUS7009383B2Mar 7, 2006
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC113 citations99
US5604444AFeb 18, 1997
Wafer probe station having environment control enclosure
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US5266889ANov 30, 1993
Wafer probe station with integrated environment control enclosure
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US6930498B2Aug 16, 2005
Membrane probing system
CASCADE MICROTECH INC68 citations97
US5532609AJul 2, 1996
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC89 citations97
US6801047B2Oct 5, 2004
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC51 citations96
US6636059B2Oct 21, 2003
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC57 citations96
US6486687B2Nov 26, 2002
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC59 citations96
US6380751B2Apr 30, 2002
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC54 citations96
US6313649B2Nov 6, 2001
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC71 citations96
US7595632B2Sep 29, 2009
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC9 citations92
US7348787B2Mar 25, 2008
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC11 citations92
US7148711B2Dec 12, 2006
Membrane probing system
CASCADE MICROTECH INC25 citations92
US6838890B2Jan 4, 2005
Membrane probing system
CASCADE MICROTECH INC34 citations92
US7403025B2Jul 22, 2008
Membrane probing system
CASCADE MICROTECH INC12 citations83