Inventor
MEIJER PETRUS MARIA
NL3 patents
Patents
3 patentsUS6667236B2Dec 23, 2003
Method of manufacturing a two layer liner for dual damascene vias
KONINKL PHILIPS ELECTRONICS NV5 citations68
US6613668B2Sep 2, 2003
Two layer liner for dual damascene via
KONINKL PHILIPS ELECTRONICS NV11 citations68
US6579792B2Jun 17, 2003
Method of manufacturing a semiconductor device
KONINKL PHILIPS ELECTRONICS NV5 citations54