Inventor
PERMANA DAVID
US3 patents
Patents
3 patentsUS6583053B2Jun 24, 2003
Use of a sacrificial layer to facilitate metallization for small features
TEXAS INSTRUMENTS INC6 citations60
US6709974B2Mar 23, 2004
Method of preventing seam defects in isolated lines
TEXAS INSTRUMENTS INC4 citations56
US6903000B2Jun 7, 2005
System for improving thermal stability of copper damascene structure
TEXAS INSTRUMENTS INC1 citations50