Inventor
TSUI TING
US5 patents
Patents
5 patentsUS6780756B1Aug 24, 2004
Etch back of interconnect dielectrics
TEXAS INSTRUMENTS INC27 citations90
US6806103B1Oct 19, 2004
Method for fabricating semiconductor devices that uses efficient plasmas
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US7939400B2May 10, 2011
Systems and methods that selectively modify liner induced stress
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US6903000B2Jun 7, 2005
System for improving thermal stability of copper damascene structure
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US7087518B2Aug 8, 2006
Method of passivating and/or removing contaminants on a low-k dielectric/copper surface
TEXAS INSTRUMENTS INC0 citations46