Inventor
KUBOTA YASUFUMI
JP10 patents
Patents
10 patentsUS6994945B2Feb 7, 2006
Silicon-containing polymer, resist composition and patterning process
SHINETSU CHEMICAL CO5 citations62
US5440063AAug 8, 1995
Concurrent preparation of dimethylchlorosilane and triorganochlorosilane
SHINETSU CHEMICAL CO3 citations62
US6943264B2Sep 13, 2005
Preparation of branched siloxane
SHINETSU CHEMICAL CO3 citations61
US11203603B2Dec 21, 2021
Carbonate-containing silane compound and making method
SHINETSU CHEMICAL CO0 citations59
US9139603B2Sep 22, 2015
[3-(2-norbornyl)-2-norbornyl]silane compound and making method
SHINETSU CHEMICAL CO0 citations51
US6875881B2Apr 5, 2005
Preparation of branched tetrasiloxane
SHINETSU CHEMICAL CO0 citations51
US6518447B2Feb 11, 2003
Thexylchlorosilanes and making process
SHINETSU CHEMICAL CO0 citations51
US6498264B2Dec 24, 2002
Silyl (meth)acrylates having bulky substituent group and preparation thereof
SHINETSU CHEMICAL CO1 citations51
US6274754B1Aug 14, 2001
Preparation of bis(3-aminopropyldimethylsilyl)benzene compounds
SHINETSU CHEMICAL CO1 citations51
US7834120B2Nov 16, 2010
Monofunctional monomer having cage oligosiloxane structure and method of making
SHINETSU CHEMICAL CO0 citations40