Inventor
LIU JINGBAO
US17 patents
⚠️ This page may combine multiple inventors who share the name “LIU JINGBAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS7316761B2Jan 8, 2008
Apparatus for uniformly etching a dielectric layer
APPLIED MATERIALS INC178 citations97
US6403491B1Jun 11, 2002
Etch method using a dielectric etch chamber with expanded process window
APPLIED MATERIALS INC396 citations97
US6451703B1Sep 17, 2002
Magnetically enhanced plasma etch process using a heavy fluorocarbon etching gas
APPLIED MATERIALS INC96 citations96
US6613689B2Sep 2, 2003
Magnetically enhanced plasma oxide etch using hexafluorobutadiene
APPLIED MATERIALS INC38 citations91
US7879186B2Feb 1, 2011
Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor
APPLIED MATERIALS INC7 citations84
US7422654B2Sep 9, 2008
Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor
APPLIED MATERIALS INC11 citations84
US7838430B2Nov 23, 2010
Plasma control using dual cathode frequency mixing
APPLIED MATERIALS INC8 citations83
US7807064B2Oct 5, 2010
Halogen-free amorphous carbon mask etch having high selectivity to photoresist
APPLIED MATERIALS INC8 citations83
US7105442B2Sep 12, 2006
Ashable layers for reducing critical dimensions of integrated circuit features
APPLIED MATERIALS INC9 citations71
US7736914B2Jun 15, 2010
Plasma control using dual cathode frequency mixing and controlling the level of polymer formation
APPLIED MATERIALS INC3 citations62