Inventor
YEH WENDY H
US13 patents
⚠️ This page may combine multiple inventors who share the name “YEH WENDY H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS7064078B2Jun 20, 2006
Techniques for the use of amorphous carbon (APF) for various etch and litho integration scheme
APPLIED MATERIALS INC114 citations96
US7718081B2May 18, 2010
Techniques for the use of amorphous carbon (APF) for various etch and litho integration schemes
APPLIED MATERIALS INC17 citations92
US6853043B2Feb 8, 2005
Nitrogen-free antireflective coating for use with photolithographic patterning
APPLIED MATERIALS INC41 citations91
US7407893B2Aug 5, 2008
Liquid precursors for the CVD deposition of amorphous carbon films
APPLIED MATERIALS INC33 citations90
US7109087B2Sep 19, 2006
Absorber layer for DSA processing
APPLIED MATERIALS INC20 citations90
US7365014B2Apr 29, 2008
Reticle fabrication using a removable hard mask
APPLIED MATERIALS INC7 citations72
US7105442B2Sep 12, 2006
Ashable layers for reducing critical dimensions of integrated circuit features
APPLIED MATERIALS INC9 citations71
US7642195B2Jan 5, 2010
Hydrogen treatment to improve photoresist adhesion and rework consistency
APPLIED MATERIALS INC6 citations62
US7776516B2Aug 17, 2010
Graded ARC for high NA and immersion lithography
APPLIED MATERIALS INC4 citations61
US7262106B2Aug 28, 2007
Absorber layer for DSA processing
APPLIED MATERIALS INC4 citations60
US7094442B2Aug 22, 2006
Methods for the reduction and elimination of particulate contamination with CVD of amorphous carbon
APPLIED MATERIALS INC4 citations57
US7737040B2Jun 15, 2010
Method of reducing critical dimension bias during fabrication of a semiconductor device
APPLIED MATERIALS INC0 citations51