Inventor
SHIBATA MASATOMO
JP37 patents
⚠️ This page may combine multiple inventors who share the name “SHIBATA MASATOMO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI CABLE
21 patentsUS6270569B1Aug 7, 2001
Method of fabricating nitride crystal, mixture, liquid phase growth method, nitride crystal, nitride crystal powders, and vapor phase growth method
HITACHI CABLE200 citations99
US6924159B2Aug 2, 2005
Semiconductor substrate made of group III nitride, and process for manufacture thereof
HITACHI CABLE113 citations98
US7674699B2Mar 9, 2010
III group nitride semiconductor substrate, substrate for group III nitride semiconductor device, and fabrication methods thereof
HITACHI CABLE44 citations96
US7847313B2Dec 7, 2010
Group III-V nitride-based semiconductor substrate and group III-V nitride-based light emitting device
HITACHI CABLE27 citations92
US7435608B2Oct 14, 2008
III-V group nitride system semiconductor self-standing substrate, method of making the same and III-V group nitride system semiconductor wafer
HITACHI CABLE30 citations92
US7276779B2Oct 2, 2007
III-V group nitride system semiconductor substrate
HITACHI CABLE27 citations92
US7253499B2Aug 7, 2007
III-V group nitride system semiconductor self-standing substrate, method of making the same and III-V group nitride system semiconductor wafer
HITACHI CABLE26 citations92
US7230282B2Jun 12, 2007
III-V group nitride system semiconductor self-standing substrate, method of making the same and III-V group nitride system semiconductor wafer
HITACHI CABLE22 citations92
US7196399B2Mar 27, 2007
Epitaxially grown nitride-based compound semiconductor crystal substrate structure with low dislocation density
HITACHI CABLE29 citations92
US7189588B2Mar 13, 2007
Group III nitride semiconductor substrate and its manufacturing method
HITACHI CABLE30 citations92
US7118934B2Oct 10, 2006
Porous substrate for epitaxial growth, method for manufacturing same, and method for manufacturing III-nitride semiconductor substrate
HITACHI CABLE18 citations92
US7981713B2Jul 19, 2011
Group III-V nitride-based semiconductor substrate, group III-V nitride-based device and method of fabricating the same
HITACHI CABLE8 citations84
US7790489B2Sep 7, 2010
III-V group nitride system semiconductor self-standing substrate, method of making the same and III-V group nitride system semiconductor wafer
HITACHI CABLE9 citations84
US7288830B2Oct 30, 2007
III-V nitride semiconductor substrate and its production method
HITACHI CABLE11 citations84
US7097920B2Aug 29, 2006
Group III nitride based semiconductor substrate and process for manufacture thereof
HITACHI CABLE16 citations84
US7829913B2Nov 9, 2010
Porous substrate and its manufacturing method, and gan semiconductor multilayer substrate and its manufacturing method
HITACHI CABLE15 citations80
US7935615B2May 3, 2011
III-V nitride semiconductor substrate and its production method
HITACHI CABLE6 citations74
US7622791B2Nov 24, 2009
III-V group nitride system semiconductor substrate
HITACHI CABLE6 citations74
US7271404B2Sep 18, 2007
Group III-V nitride-based semiconductor substrate and method of making same
HITACHI CABLE6 citations74
US7045808B2May 16, 2006
III-V nitride semiconductor substrate and its production lot, and III-V nitride semiconductor device and its production method
HITACHI CABLE6 citations74
US7057204B2Jun 6, 2006
III-V group nitride system semiconductor substrate
HITACHI CABLE5 citations63
SUMITOMO CHEMICAL CO
5 patentsUS12258678B2Mar 25, 2025
Gallium nitride single crystal substrate
SUMITOMO CHEMICAL CO2 citations73
US11718927B2Aug 8, 2023
Group III nitride crystal substrate having a diameter of 4 inches or more and a curved c-plane with a radius of curvature of 15 m or more
SUMITOMO CHEMICAL CO0 citations62
US12553150B2Feb 17, 2026
Gallium nitride single crystal substrate and method for producing the same
SUMITOMO CHEMICAL CO0 citations61
US10253432B2Apr 9, 2019
Semiconductor substrate manufacturing method
SUMITOMO CHEMICAL CO0 citations52
US10100434B2Oct 16, 2018
Nitride semiconductor single crystal substrate manufacturing method
SUMITOMO CHEMICAL CO0 citations42
SCIOCS CO LTD
3 patentsUS10978296B2Apr 13, 2021
Nitride semiconductor substrate, semiconductor laminate, laminated structure, method for manufacturing nitride semiconductor substrate and method for manufacturing semiconductor laminate
SCIOCS CO LTD4 citations73
US10290489B2May 14, 2019
Method for manufacturing group-III nitride substrate and group-III nitride substrate
SCIOCS CO LTD1 citations62
US10584031B2Mar 10, 2020
Nitride crystal substrate
SCIOCS CO LTD0 citations52
UNIV OSAKA
3 patentsUS10309036B2Jun 4, 2019
Method for manufacturing group-III nitride semiconductor crystal substrate
UNIV OSAKA0 citations51
US10260165B2Apr 16, 2019
Method for manufacturing nitride crystal substrate and substrate for crystal growth
UNIV OSAKA0 citations41
US10266965B2Apr 23, 2019
Method for producing group-III nitride crystal, group-III nitride crystal, semiconductor device, and device for producing group-III nitride crystal
UNIV OSAKA0 citations40
NEC CORP
2 patentsUS6824610B2Nov 30, 2004
Process for producing gallium nitride crystal substrate, and gallium nitride crystal substrate
NEC CORP37 citations92
US6812051B2Nov 2, 2004
Method of forming an epitaxially grown nitride-based compound semiconductor crystal substrate structure and the same substrate structure
NEC CORP26 citations92