Inventor
HARNED ROBERT D
US12 patents
⚠️ This page may combine multiple inventors who share the name “HARNED ROBERT D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
11 patentsUS7158215B2Jan 2, 2007
Large field of view protection optical system with aberration correctability for flat panel displays
ASML HOLDING NV27 citations89
US7184124B2Feb 27, 2007
Lithographic apparatus having an adjustable projection system and device manufacturing method
ASML HOLDING NV13 citations82
US7643128B2Jan 5, 2010
Large field of view projection optical system with aberration correctability
ASML HOLDING NV6 citations73
US7678458B2Mar 16, 2010
Bonding silicon silicon carbide to glass ceramics
ASML HOLDING NV6 citations71
US7443514B2Oct 28, 2008
Diffractive null corrector employing a spatial light modulator
ASML HOLDING NV7 citations71
US7224469B2May 29, 2007
Optical system alignment system and method with high accuracy and simple operation
ASML HOLDING NV7 citations71
US7826142B2Nov 2, 2010
Method for improved optical design using deterministically defined surfaces
ASML HOLDING NV4 citations60
US7405802B2Jul 29, 2008
Large field of view 2X magnification projection optical system for FPD manufacture
ASML HOLDING NV1 citations56
US7420722B2Sep 2, 2008
Multiple illumination source exposure apparatus
ASML HOLDING NV0 citations46
US7342701B2Mar 11, 2008
Multiple illumination source exposure apparatus
ASML HOLDING NV0 citations46
US7426076B2Sep 16, 2008
Projection system for a lithographic apparatus
ASML HOLDING NV0 citations40