Inventor
HARNED NORA-JEAN
US6 patents
⚠️ This page may combine multiple inventors who share the name “HARNED NORA-JEAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
5 patentsUS7184124B2Feb 27, 2007
Lithographic apparatus having an adjustable projection system and device manufacturing method
ASML HOLDING NV13 citations82
US7443514B2Oct 28, 2008
Diffractive null corrector employing a spatial light modulator
ASML HOLDING NV7 citations71
US7224469B2May 29, 2007
Optical system alignment system and method with high accuracy and simple operation
ASML HOLDING NV7 citations71
US7826142B2Nov 2, 2010
Method for improved optical design using deterministically defined surfaces
ASML HOLDING NV4 citations60
US7426076B2Sep 16, 2008
Projection system for a lithographic apparatus
ASML HOLDING NV0 citations40