Inventor

TU SHIH-YU

TW19 patents

⚠️ This page may combine multiple inventors who share the name “TU SHIH-YU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TU SHIH-YU

TAIWAN SEMICONDUCTOR MFG CO LTD

System and method for detecting debris in a photolithography system

Replacement method for droplet generator

EUV photolithography system fuel source and methods of operating the same

Highly efficient automatic particle cleaner method for EUV systems

Semiconductor processing tool and methods of operation

System and method for detecting debris in a photolithography system

Replacement and refill method for droplet generator

Droplet catcher, droplet catcher system of EUV lithography apparatus, and maintenance method of the EUV lithography apparatus

Droplet generator assembly and method for using the same and radiation source apparatus

Droplet catcher system of EUV lithography apparatus and EUV lithography apparatus maintenance method

Refill and replacement method for droplet generator

EUV photolithography system fuel source and methods of operating the same

Method of cleaning wafer table of photolithography system and method of manufacturing integrated circuit

Highly efficient automatic particle cleaner method for EUV systems

UNIV NAT SUN YAT SEN

Fiber used in wideband amplified spontaneous emission light source and the method of making the same

Fiber used in wideband amplified spontaneous emission light source and the method of making the same

ACADEMIA SINICA

High repetition rate visible optical parametric oscillator

HUANG SHENG-LUNG

Fiber used in wideband amplified spontaneous emission light source and the method of making the same

UNIV NAT TAIWAN

Partial random laser illumination system and device having a random phase and amplitude component