Inventor
TATEIWA KENJI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “TATEIWA KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
5 patentsUS6794677B2Sep 21, 2004
Semiconductor integrated circuit device and method for fabricating the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD112 citations97
US6187688B1Feb 13, 2001
Pattern formation method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD44 citations91
US5444529AAug 22, 1995
Method of inspecting particles on semiconductor devices
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD32 citations90
US4764483AAug 16, 1988
Method for burying a step in a semiconductor substrate
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD10 citations73
US5108953AApr 28, 1992
Method for fabricating a semiconductive device comprising a refractory metal silicide thin film
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD4 citations60