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Inventor

DONNELLY VINCENT M

US13 patents
⚠️ This page may combine multiple inventors who share the name “DONNELLY VINCENT M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BELL TELEPHONE LABOR INC

4 patents
US4377436AMar 22, 1983

Plasma-assisted etch process with endpoint detection

BELL TELEPHONE LABOR INC39 citations92
US4394237AJul 19, 1983

Spectroscopic monitoring of gas-solid processes

BELL TELEPHONE LABOR INC27 citations82
US4397711AAug 9, 1983

Crystallographic etching of III-V semiconductor materials

BELL TELEPHONE LABOR INC23 citations81
US4359485ANov 16, 1982

Radiation induced deposition of metal on semiconductor surfaces

BELL TELEPHONE LABOR INC28 citations81

UNIV HOUSTON SYSTEM

2 patents
US10515782B2Dec 24, 2019

Atomic layer etching with pulsed plasmas

UNIV HOUSTON SYSTEM4 citations71
US10207469B2Feb 19, 2019

Systems and methods for rapidly fabricating nanopatterns in a parallel fashion over large areas

UNIV HOUSTON SYSTEM0 citations50

UNIV HOUSTON

2 patents
US7883839B2Feb 8, 2011

Method and apparatus for nano-pantography

UNIV HOUSTON6 citations71
US8030620B2Oct 4, 2011

System and method for nano-pantography

UNIV HOUSTON1 citations49

TOKYO ELECTRON LTD

2 patents
US7358484B2Apr 15, 2008

Hyperthermal neutral beam source and method of operating

TOKYO ELECTRON LTD5 citations62
US7638759B2Dec 29, 2009

Hyperthermal neutral beam source and method of operating

TOKYO ELECTRON LTD1 citations51

AT & T BELL LAB

1 patent
US4498953AFeb 12, 1985

Etching techniques

AT & T BELL LAB287 citations97

ZHAO JIANPING

1 patent
US8968588B2Mar 3, 2015

Low electron temperature microwave surface-wave plasma (SWP) processing method and apparatus

ZHAO JIANPING23 citations91

AT & T LAB

1 patent
US4645687AFeb 24, 1987

Deposition of III-V semiconductor materials

AT & T LAB18 citations81