Inventor

ECONOMOU DEMETRE J

US9 patents

⚠️ This page may combine multiple inventors who share the name “ECONOMOU DEMETRE J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents

US7358484B2Apr 15, 2008

Hyperthermal neutral beam source and method of operating

TOKYO ELECTRON LTD5 citations62

US7638759B2Dec 29, 2009

Hyperthermal neutral beam source and method of operating

TOKYO ELECTRON LTD1 citations51

US9852893B2Dec 26, 2017

Dipole ring magnet assisted microwave radial line slot antenna plasma processing method and apparatus

TOKYO ELECTRON LTD0 citations41

UNIV HOUSTON SYSTEM

2 patents

US10515782B2Dec 24, 2019

Atomic layer etching with pulsed plasmas

UNIV HOUSTON SYSTEM4 citations71

US10207469B2Feb 19, 2019

Systems and methods for rapidly fabricating nanopatterns in a parallel fashion over large areas

UNIV HOUSTON SYSTEM0 citations50

UNIV HOUSTON

2 patents

US7883839B2Feb 8, 2011

Method and apparatus for nano-pantography

UNIV HOUSTON6 citations71

US8030620B2Oct 4, 2011

System and method for nano-pantography

UNIV HOUSTON1 citations49

ZHAO JIANPING

1 patent

US8968588B2Mar 3, 2015

Low electron temperature microwave surface-wave plasma (SWP) processing method and apparatus

ZHAO JIANPING23 citations91

TEXAS INSTRUMENTS INC

1 patent

US4859277AAug 22, 1989

Method for measuring plasma properties in semiconductor processing

TEXAS INSTRUMENTS INC43 citations91