P

Inventor

SHINDO TOSHIHIKO

JP8 patents
⚠️ This page may combine multiple inventors who share the name “SHINDO TOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHINETSU CHEMICAL CO

3 patents
US5663865ASep 2, 1997

Ceramic electrostatic chuck with built-in heater

SHINETSU CHEMICAL CO71 citations94
US7951513B2May 31, 2011

Pellicle and method for producing pellicle

SHINETSU CHEMICAL CO16 citations83
US7919217B2Apr 5, 2011

Pellicle and method for producing pellicle

SHINETSU CHEMICAL CO4 citations62

TOKYO ELECTRON LTD

3 patents
US7541283B2Jun 2, 2009

Plasma processing method and plasma processing apparatus

TOKYO ELECTRON LTD5 citations72
US9780037B2Oct 3, 2017

Method of processing target object

TOKYO ELECTRON LTD2 citations71
US7799238B2Sep 21, 2010

Plasma processing method and plasma processing apparatus

TOKYO ELECTRON LTD3 citations61

SHINDO TOSHIHIKO

1 patent
US8287750B2Oct 16, 2012

Plasma processing method and plasma processing apparatus

SHINDO TOSHIHIKO0 citations44

SHIMIZU RYUKICHI

1 patent
US8263498B2Sep 11, 2012

Semiconductor device fabricating method, plasma processing system and storage medium

SHIMIZU RYUKICHI0 citations30