Inventor

TSUEI LUN

US6 patents

⚠️ This page may combine multiple inventors who share the name “TSUEI LUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US6946033B2Sep 20, 2005

Heated gas distribution plate for a processing chamber

APPLIED MATERIALS INC227 citations98

US7806383B2Oct 5, 2010

Slit valve

APPLIED MATERIALS INC6 citations58

SPM FLOW CONTROL INC

2 patents

US9568138B2Feb 14, 2017

Manifold assembly

SPM FLOW CONTROL INC52 citations95

US10738928B2Aug 11, 2020

Manifold assembly

SPM FLOW CONTROL INC33 citations92

TSUEI LUN

1 patent

US9714465B2Jul 25, 2017

Gas distribution blocker apparatus

TSUEI LUN30 citations89

LUBOMIRSKY DMITRY

1 patent

US8333842B2Dec 18, 2012

Apparatus for etching semiconductor wafers

LUBOMIRSKY DMITRY7 citations83