Inventor

CHAKRAVORTY KISHORE

US3 patents

Patents

3 patents

US8221944B2Jul 17, 2012

Pellicle frame and lithographic pellicle

SHIRASAKI TORU8 citations80

US8221945B2Jul 17, 2012

Pellicle frame and lithographic pellicle

SHIRASAKI TORU5 citations58

US8467035B2Jun 18, 2013

Pellicle frame and lithographic pellicle

SHIRASAKI TORU0 citations48