Inventor
BURROWS BRIAN H
US16 patents
⚠️ This page may combine multiple inventors who share the name “BURROWS BRIAN H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS7976631B2Jul 12, 2011
Multi-gas straight channel showerhead
APPLIED MATERIALS INC247 citations97
US6145673ANov 14, 2000
Wafer transfer cassette
APPLIED MATERIALS INC69 citations93
US6807972B2Oct 26, 2004
Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber
APPLIED MATERIALS INC13 citations83
US9644267B2May 9, 2017
Multi-gas straight channel showerhead
APPLIED MATERIALS INC6 citations82
US7704327B2Apr 27, 2010
High temperature anneal with improved substrate support
APPLIED MATERIALS INC18 citations80
US11578004B2Feb 14, 2023
Methods and apparatus for depositing materials on a continuous substrate
APPLIED MATERIALS INC1 citations62
US10995419B2May 4, 2021
Methods and apparatus for gallium nitride deposition
APPLIED MATERIALS INC0 citations62
US11807931B2Nov 7, 2023
Chamber injector
APPLIED MATERIALS INC0 citations59
US11492704B2Nov 8, 2022
Chamber injector
APPLIED MATERIALS INC0 citations59
US11189508B2Nov 30, 2021
Purged viewport for quartz dome in epitaxy reactor
APPLIED MATERIALS INC1 citations56
US12037701B2Jul 16, 2024
Multi-thermal CVD chambers with shared gas delivery and exhaust system
APPLIED MATERIALS INC0 citations50
US9982364B2May 29, 2018
Process gas preheating systems and methods for double-sided multi-substrate batch processing
APPLIED MATERIALS INC0 citations40