Inventor
SAIKI WATARU
JP8 patents
⚠️ This page may combine multiple inventors who share the name “SAIKI WATARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAIKI WATARU
3 patentsUS8168152B2May 1, 2012
Method for producing trichlorosilane and method for utilizing trichlorosilane
SAIKI WATARU3 citations57
US9994455B2Jun 12, 2018
Apparatus and method for manufacturing trichlorosilane and method for manufacturing polycrystalline silicon
SAIKI WATARU0 citations36
US8491862B2Jul 23, 2013
Apparatus and method for producing trichlorosilane
SAIKI WATARU0 citations32