Inventor
MARKWORT LARS
DE17 patents
⚠️ This page may combine multiple inventors who share the name “MARKWORT LARS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MARKWORT LARS
6 patentsUS8102521B2Jan 24, 2012
Optical inspection system and method
MARKWORT LARS7 citations81
US8072591B2Dec 6, 2011
Optical inspection system and method
MARKWORT LARS7 citations81
US8460946B2Jun 11, 2013
Methods of processing and inspecting semiconductor substrates
MARKWORT LARS1 citations48
US9182357B2Nov 10, 2015
Semiconductor wafer inspection system and method
MARKWORT LARS0 citations38
US8501503B2Aug 6, 2013
Methods of inspecting and manufacturing semiconductor wafers
MARKWORT LARS0 citations38
US8778702B2Jul 15, 2014
Method of inspecting and processing semiconductor wafers
MARKWORT LARS0 citations33