Inventor
MANTZ ULRICH
DE20 patents
⚠️ This page may combine multiple inventors who share the name “MANTZ ULRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
8 patentsUS7307735B2Dec 11, 2007
Method for determining the depth of a buried structure
INFINEON TECHNOLOGIES AG16 citations83
US7427774B1Sep 23, 2008
Targets for measurements in semiconductor devices
INFINEON TECHNOLOGIES AG17 citations82
US6486675B1Nov 26, 2002
In-situ method for measuring the endpoint of a resist recess etch process
INFINEON TECHNOLOGIES AG8 citations74
US7046363B2May 16, 2006
Optical measurement system and method
INFINEON TECHNOLOGIES AG6 citations62
US7405089B2Jul 29, 2008
Method and apparatus for measuring a surface profile of a sample
INFINEON TECHNOLOGIES AG5 citations57
US7358491B2Apr 15, 2008
Method and apparatus for the depth-resolved characterization of a layer of a carrier
INFINEON TECHNOLOGIES AG3 citations54
US7362453B2Apr 22, 2008
Method for the characterization of a film
INFINEON TECHNOLOGIES AG1 citations51
US7262837B2Aug 28, 2007
Noninvasive method for characterizing and identifying embedded micropatterns
INFINEON TECHNOLOGIES AG0 citations39