Inventor
AIKAWA KENICHIRO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “AIKAWA KENICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGK INSULATORS LTD
12 patentsUS11948825B2Apr 2, 2024
Wafer placement table
NGK INSULATORS LTD2 citations72
US11610798B2Mar 21, 2023
Electrostatic chuck assembly, electrostatic chuck, and focus ring
NGK INSULATORS LTD3 citations71
US11282734B2Mar 22, 2022
Electrostatic chuck and method for manufacturing the same
NGK INSULATORS LTD2 citations71
US12284729B2Apr 22, 2025
Ceramic heater with shaft
NGK INSULATORS LTD0 citations62
US12108499B2Oct 1, 2024
Ceramic heater with shaft
NGK INSULATORS LTD0 citations62
US12087613B2Sep 10, 2024
Wafer placement table and method of manufacturing the same
NGK INSULATORS LTD0 citations62
US11951583B2Apr 9, 2024
Electrostatic chuck with high insulation performance and electrostatic attraction force
NGK INSULATORS LTD0 citations62
US9202718B2Dec 1, 2015
Electrostatic chuck
NGK INSULATORS LTD3 citations62
US11837490B2Dec 5, 2023
Electrostatic chuck heater
NGK INSULATORS LTD0 citations61
US12230526B2Feb 18, 2025
Electrostatic chuck heater
NGK INSULATORS LTD0 citations51
US9184081B2Nov 10, 2015
Electrostatic chuck
NGK INSULATORS LTD0 citations51
US12027385B2Jul 2, 2024
Ceramic heater
NGK INSULATORS LTD0 citations50