Inventor

KATSUDA YUJI

JP82 patents

⚠️ This page may combine multiple inventors who share the name “KATSUDA YUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KATSUDA YUJI

NGK INSULATORS LTD

Halogen gas plasma-resistive members and method for producing the same, laminates, and corrosion-resistant members

Aluminum nitride-based sintered bodies, corrosion-resistant members, metal-buried articles and semiconductor-holding apparatuses

Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same

Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck

Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same

Aluminum nitride sintered bodies and semiconductor-producing members including same

Electrically heated substrate with multiple ceramic parts each having different volume resitivities

Electrically heated substrate with multiple ceramic parts each having different volume restivities

Porous composite ceramic sintered bodies and a production process thereof

Semiconductor supporting device

Aluminum nitride sintered body, electronic functional material, and electrostatic chuck

Aluminum nitride sintered body and semiconductor manufacturing apparatus member

Aluminum nitride sintered bodies and members for semiconductor-producing apparatuses

NOx sensor

Laminated structure, member for semiconductor manufacturing apparatus, and method for producing laminated structure

Corrosion-resistant member for semiconductor manufacturing apparatus and method for manufacturing the same

Corrosion-resistant member for semiconductor manufacturing apparatus and method for manufacturing the same

Yttrium oxide material, member for semiconductor-manufacturing apparatus, and method for producing yttrium oxide material

Yttrium oxide-containing material, component of semiconductor manufacturing equipment, and method of producing yttrium oxide-containing material

Material of low volume resistivity, an aluminum nitride sintered body and a member used for the production of semiconductors

Yttrium oxide material, member for use in semiconductor manufacturing apparatus, and method for producing yttrium oxide material

Aluminum nitride based composite body electronic functional material, electrostatic chuck and method of producing aluminum nitride based composite body

Apparatus and method for measuring concentrations of gas components

Mullite sintered body, method for producing the same, and composite substrate

Cordierite sintered body, method for manufacturing the same, composite substrate, and electronic device

Sintered compact, circuit component, and method of producing sintered compact

Aluminum-containing member and a method for producing such an aluminum-containing member

Composite sintered body, semiconductor manufacturing apparatus member, and method of manufacturing composite sintered body

MgO-based ceramic film, member for semiconductor manufacturing apparatus, and method for forming MgO-based ceramic film

Sintered ceramic body, manufacturing method thereof, and ceramic structure

Composite material and method of producing the same

Aluminum nitride ceramics, members for use in a system for producing semiconductors, corrosion resistant members and conductive members

Ceramic structure, member for substrate-holding apparatus, and method for producing the ceramic structure

Bonding material composition, aluminum nitride bonded body, and method for producing the same

Heating device

Electrostatic chuck

Dense composite material, method for producing the same, and component for semiconductor production equipment

Dense composite material, method for manufacturing the same, joined body, and member for semiconductor manufacturing apparatuses

Aluminum nitride ceramics and a member used for the production of semiconductors

Aluminum nitride materials and members used for the production of semiconductors

Composite sintered body, semiconductor manufacturing apparatus member, and method of manufacturing composite sintered body

Cooling plate, method for manufacturing the same, and member for semiconductor manufacturing apparatus

Cooling plate, method for manufacturing the same, and member for semiconductor manufacturing apparatus

Solid electrolyte, all-solid-state lithium-ion secondary battery, production method for solid electrolyte

Member for semiconductor manufacturing apparatus, method for producing the same, and heater including shaft

WATANABE MORIMICHI

Ceramic material, member for semiconductor manufacturing equipment, sputtering target member and method for producing ceramic material

Ceramic material, laminate, member for use in semiconductor manufacturing equipment, and sputtering target member

TERATANI NAOMI

Alumina sintered body, method for manufacturing the same, and semiconductor manufacturing apparatus member

NGK INSULATORS INC

Aluminum nitride ceramics, members for use in a system for producing semiconductors, and corrosion resistant members

YAMAZAKI SATOSHI

Cordierite ceramic and method of producing the same