Inventor
TANIHARA AKIRA
JP4 patents
⚠️ This page may combine multiple inventors who share the name “TANIHARA AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS9548187B2Jan 17, 2017
Microwave radiation antenna, microwave plasma source and plasma processing apparatus
TOKYO ELECTRON LTD1 citations51
US9640388B2May 2, 2017
Method for forming insulating film and method for manufacturing semiconductor device
TOKYO ELECTRON LTD0 citations46
US10319567B2Jun 11, 2019
Microwave plasma source and plasma processing apparatus
TOKYO ELECTRON LTD0 citations39