Inventor
REDDY SIRISH K
US12 patents
⚠️ This page may combine multiple inventors who share the name “REDDY SIRISH K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
10 patentsUS9778561B2Oct 3, 2017
Vacuum-integrated hardmask processes and apparatus
LAM RES CORP380 citations99
US10831096B2Nov 10, 2020
Vacuum-integrated hardmask processes and apparatus
LAM RES CORP34 citations98
US11209729B2Dec 28, 2021
Vacuum-integrated hardmask processes and apparatus
LAM RES CORP21 citations94
US10514598B2Dec 24, 2019
Vacuum-integrated hardmask processes and apparatus
LAM RES CORP33 citations94
US9589799B2Mar 7, 2017
High selectivity and low stress carbon hardmask by pulsed low frequency RF power
LAM RES CORP10 citations83
US9320387B2Apr 26, 2016
Sulfur doped carbon hard masks
LAM RES CORP6 citations80
US9018103B2Apr 28, 2015
High aspect ratio etch with combination mask
LAM RES CORP5 citations73
US10192759B2Jan 29, 2019
Image reversal with AHM gap fill for multiple patterning
LAM RES CORP4 citations72
US10242883B2Mar 26, 2019
High aspect ratio etch of oxide metal oxide metal stack
LAM RES CORP0 citations52
US9659783B2May 23, 2017
High aspect ratio etch with combination mask
LAM RES CORP1 citations52