Inventor
ENG LARS
US13 patents
⚠️ This page may combine multiple inventors who share the name “ENG LARS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SILICON LIGHT MACHINES CORP
9 patentsUS10746983B2Aug 18, 2020
Spatial light modulators for phased-array applications
SILICON LIGHT MACHINES CORP2 citations72
US11662571B2May 30, 2023
Spatial light modulators for phased-array applications
SILICON LIGHT MACHINES CORP0 citations62
US11958738B2Apr 16, 2024
Dual-layer micro-ribbon MEMS light modulator
SILICON LIGHT MACHINES CORP0 citations60
US12504695B2Dec 23, 2025
MEMS based spatial light modulators and applications
SILICON LIGHT MACHINES CORP0 citations59
US11933962B2Mar 19, 2024
MEMS based spatial light modulators and applications
SILICON LIGHT MACHINES CORP0 citations59
US12117606B2Oct 15, 2024
MEMs phased-array for LiDAR applications
SILICON LIGHT MACHINES CORP0 citations58
US11453165B2Sep 27, 2022
Stacked PLV driver architecture for a microelectromechanical system spatial light modulator
SILICON LIGHT MACHINES CORP0 citations51
US9798239B2Oct 24, 2017
Flow through MEMS package
SILICON LIGHT MACHINES CORP0 citations51
US11579439B2Feb 14, 2023
MEMS based spectral shaper using a broadband source
SILICON LIGHT MACHINES CORP0 citations46