Inventor
PAYNE ALEXANDER
US27 patents
⚠️ This page may combine multiple inventors who share the name “PAYNE ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SILICON LIGHT MACHINES CORP
19 patentsUS7288424B2Oct 30, 2007
Integrated driver process flow
SILICON LIGHT MACHINES CORP13 citations92
US11016287B2May 25, 2021
High étendue spatial light modulator
SILICON LIGHT MACHINES CORP9 citations85
US6958818B1Oct 25, 2005
Fabry-Perot interferometer including membrane supported reflector
SILICON LIGHT MACHINES CORP18 citations84
US7046420B1May 16, 2006
MEM micro-structures and methods of making the same
SILICON LIGHT MACHINES CORP9 citations74
US10746983B2Aug 18, 2020
Spatial light modulators for phased-array applications
SILICON LIGHT MACHINES CORP2 citations72
US10665182B1May 26, 2020
Efficient data transmission in analog spatial light modulators
SILICON LIGHT MACHINES CORP5 citations65
US11662571B2May 30, 2023
Spatial light modulators for phased-array applications
SILICON LIGHT MACHINES CORP0 citations62
US12181657B2Dec 31, 2024
Reflective two-dimensional spatial light modulators
SILICON LIGHT MACHINES CORP0 citations61
US7463403B1Dec 9, 2008
High impedance drive circuit for a micro-electromechanical system device
SILICON LIGHT MACHINES CORP4 citations61
US11958738B2Apr 16, 2024
Dual-layer micro-ribbon MEMS light modulator
SILICON LIGHT MACHINES CORP0 citations60
US12504695B2Dec 23, 2025
MEMS based spatial light modulators and applications
SILICON LIGHT MACHINES CORP0 citations59
US12405534B2Sep 2, 2025
MEMs based spatial light modulators with improved thermal control
SILICON LIGHT MACHINES CORP0 citations59
US11933962B2Mar 19, 2024
MEMS based spatial light modulators and applications
SILICON LIGHT MACHINES CORP0 citations59
US12117606B2Oct 15, 2024
MEMs phased-array for LiDAR applications
SILICON LIGHT MACHINES CORP0 citations58
US12560851B2Feb 24, 2026
System and method for wavelength-selective attenuation and modulation
SILICON LIGHT MACHINES CORP0 citations52
US11453165B2Sep 27, 2022
Stacked PLV driver architecture for a microelectromechanical system spatial light modulator
SILICON LIGHT MACHINES CORP0 citations51
US9798239B2Oct 24, 2017
Flow through MEMS package
SILICON LIGHT MACHINES CORP0 citations51
US12253667B2Mar 18, 2025
High contrast spatial light modulator
SILICON LIGHT MACHINES CORP0 citations50
US11579439B2Feb 14, 2023
MEMS based spectral shaper using a broadband source
SILICON LIGHT MACHINES CORP0 citations46
SILICON LIGHT MACHINES INC
3 patentsUS6387723B1May 14, 2002
Reduced surface charging in silicon-based devices
SILICON LIGHT MACHINES INC47 citations93
US6801354B1Oct 5, 2004
2-D diffraction grating for substantially eliminating polarization dependent losses
SILICON LIGHT MACHINES INC28 citations92
US6660552B2Dec 9, 2003
Reduced surface charging in silicon-based devices
SILICON LIGHT MACHINES INC38 citations90