P

Inventor

PAYNE ALEXANDER

US27 patents
⚠️ This page may combine multiple inventors who share the name “PAYNE ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SILICON LIGHT MACHINES CORP

19 patents
US7288424B2Oct 30, 2007

Integrated driver process flow

SILICON LIGHT MACHINES CORP13 citations92
US11016287B2May 25, 2021

High étendue spatial light modulator

SILICON LIGHT MACHINES CORP9 citations85
US6958818B1Oct 25, 2005

Fabry-Perot interferometer including membrane supported reflector

SILICON LIGHT MACHINES CORP18 citations84
US7046420B1May 16, 2006

MEM micro-structures and methods of making the same

SILICON LIGHT MACHINES CORP9 citations74
US10746983B2Aug 18, 2020

Spatial light modulators for phased-array applications

SILICON LIGHT MACHINES CORP2 citations72
US10665182B1May 26, 2020

Efficient data transmission in analog spatial light modulators

SILICON LIGHT MACHINES CORP5 citations65
US11662571B2May 30, 2023

Spatial light modulators for phased-array applications

SILICON LIGHT MACHINES CORP0 citations62
US12181657B2Dec 31, 2024

Reflective two-dimensional spatial light modulators

SILICON LIGHT MACHINES CORP0 citations61
US7463403B1Dec 9, 2008

High impedance drive circuit for a micro-electromechanical system device

SILICON LIGHT MACHINES CORP4 citations61
US11958738B2Apr 16, 2024

Dual-layer micro-ribbon MEMS light modulator

SILICON LIGHT MACHINES CORP0 citations60
US12504695B2Dec 23, 2025

MEMS based spatial light modulators and applications

SILICON LIGHT MACHINES CORP0 citations59
US12405534B2Sep 2, 2025

MEMs based spatial light modulators with improved thermal control

SILICON LIGHT MACHINES CORP0 citations59
US11933962B2Mar 19, 2024

MEMS based spatial light modulators and applications

SILICON LIGHT MACHINES CORP0 citations59
US12117606B2Oct 15, 2024

MEMs phased-array for LiDAR applications

SILICON LIGHT MACHINES CORP0 citations58
US12560851B2Feb 24, 2026

System and method for wavelength-selective attenuation and modulation

SILICON LIGHT MACHINES CORP0 citations52
US11453165B2Sep 27, 2022

Stacked PLV driver architecture for a microelectromechanical system spatial light modulator

SILICON LIGHT MACHINES CORP0 citations51
US9798239B2Oct 24, 2017

Flow through MEMS package

SILICON LIGHT MACHINES CORP0 citations51
US12253667B2Mar 18, 2025

High contrast spatial light modulator

SILICON LIGHT MACHINES CORP0 citations50
US11579439B2Feb 14, 2023

MEMS based spectral shaper using a broadband source

SILICON LIGHT MACHINES CORP0 citations46

SILICON LIGHT MACHINES INC

3 patents

PAYNE ALEXANDER

2 patents

HIROE TOSHIO

1 patent

SANO KENICHI

1 patent

LU JOSHUA

1 patent