Inventor
AIKENS DAVID M
US13 patents
⚠️ This page may combine multiple inventors who share the name “AIKENS DAVID M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
THERMA WAVE INC
6 patentsUS6898596B2May 24, 2005
Evolution of library data sets
THERMA WAVE INC74 citations96
US6744505B1Jun 1, 2004
Compact imaging spectrometer
THERMA WAVE INC46 citations92
US6587282B1Jul 1, 2003
Broadband refractive objective for small spot optical metrology
THERMA WAVE INC24 citations92
US6862090B2Mar 1, 2005
Coaxial illumination system
THERMA WAVE INC12 citations82
US6879449B2Apr 12, 2005
Broadband refractive objective for small spot optical metrology
THERMA WAVE INC6 citations73
US7154607B2Dec 26, 2006
Flat spectrum illumination source for optical metrology
THERMA WAVE INC8 citations70
PERKINELMER HEALTH SCI INC
4 patentsUS11639874B2May 2, 2023
Echelle spectrometer
PERKINELMER HEALTH SCI INC0 citations62
US8797528B2Aug 5, 2014
Flow cell assembly for liquid sample analyzer
PERKINELMER HEALTH SCI INC1 citations61
US9025142B1May 5, 2015
Flow cell assembly for liquid sample analyzer
PERKINELMER HEALTH SCI INC0 citations51
US8947654B2Feb 3, 2015
Flow cell assembly for liquid sample analyzer
PERKINELMER HEALTH SCI INC1 citations51