Inventor
LIN IN-TSANG
TW8 patents
Patents
8 patentsUS10128203B2Nov 13, 2018
Fan-out package structure, antenna system and associated method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US9601439B1Mar 21, 2017
Semiconductor structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10043745B2Aug 7, 2018
Semiconductor package devices integrated with inductor
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11565365B2Jan 31, 2023
System and method for monitoring chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations70
US10872793B2Dec 22, 2020
System and method for monitoring operation conditions of semiconductor manufacturing apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations70
US12521836B2Jan 13, 2026
System and method for monitoring chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11017522B2May 25, 2021
Inspection and cleaning system and method for the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US10510660B2Dec 17, 2019
Semiconductor package devices integrated with inductor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51