Inventor
TEDESCHI LEONARD
US19 patents
Patents
19 patentsUS9725302B1Aug 8, 2017
Wafer processing equipment having exposable sensing layers
APPLIED MATERIALS INC18 citations91
US9975758B2May 22, 2018
Wafer processing equipment having exposable sensing layers
APPLIED MATERIALS INC8 citations83
US10083883B2Sep 25, 2018
Wafer processing equipment having capacitive micro sensors
APPLIED MATERIALS INC9 citations79
US11735486B2Aug 22, 2023
Process monitor device having a plurality of sensors arranged in concentric circles
APPLIED MATERIALS INC2 citations72
US10067070B2Sep 4, 2018
Particle monitoring device
APPLIED MATERIALS INC2 citations72
US11348846B2May 31, 2022
Wafer processing tool having a micro sensor
APPLIED MATERIALS INC0 citations61
US12163911B2Dec 10, 2024
Capacitive sensor housing for chamber condition monitoring
APPLIED MATERIALS INC0 citations60
US11415538B2Aug 16, 2022
Capacitive sensor housing for chamber condition monitoring
APPLIED MATERIALS INC0 citations60
US11088000B2Aug 10, 2021
Wafer based corrosion and time dependent chemical effects
APPLIED MATERIALS INC0 citations59
US10923405B2Feb 16, 2021
Wafer processing equipment having capacitive micro sensors
APPLIED MATERIALS INC0 citations58
US12537179B2Jan 27, 2026
Capacitive sensing data integration for plasma chamber condition monitoring
APPLIED MATERIALS INC0 citations57
US11545346B2Jan 3, 2023
Capacitive sensing data integration for plasma chamber condition monitoring
APPLIED MATERIALS INC0 citations57
US12437979B2Oct 7, 2025
Capacitive sensors and capacitive sensing locations for plasma chamber condition monitoring
APPLIED MATERIALS INC0 citations51
US10818561B2Oct 27, 2020
Process monitor device having a plurality of sensors arranged in concentric circles
APPLIED MATERIALS INC0 citations51
US10818564B2Oct 27, 2020
Wafer processing tool having a micro sensor
APPLIED MATERIALS INC0 citations51
US10718719B2Jul 21, 2020
Particle monitoring device
APPLIED MATERIALS INC0 citations51
US11551905B2Jan 10, 2023
Resonant process monitor
APPLIED MATERIALS INC0 citations50
US11581206B2Feb 14, 2023
Capacitive sensor for chamber condition monitoring
APPLIED MATERIALS INC0 citations49
US10515862B2Dec 24, 2019
Wafer based corrosion and time dependent chemical effects
APPLIED MATERIALS INC0 citations49