Inventor
GUO REN-HUA
TW9 patents
Patents
9 patentsUS10147609B2Dec 4, 2018
Semiconductor epitaxy bordering isolation structure
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations83
US10957540B2Mar 23, 2021
Semiconductor epitaxy bordering isolation structure
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10522353B2Dec 31, 2019
Semiconductor epitaxy bordering isolation structure
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US9899210B2Feb 20, 2018
Chemical vapor deposition apparatus and method for manufacturing semiconductor device using the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations70
US11658032B2May 23, 2023
Semiconductor epitaxy bordering isolation structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11930628B2Mar 12, 2024
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US11621268B2Apr 4, 2023
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US11088150B2Aug 10, 2021
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US10475643B2Nov 12, 2019
Deposition apparatus and method for manufacturing semiconductor device using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49