Inventor
ARNO JOSE
US14 patents
⚠️ This page may combine multiple inventors who share the name “ARNO JOSE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
10 patentsUS6749671B2Jun 15, 2004
Abatement of effluents from chemical vapor deposition processes using organometallic source reagents
ADVANCED TECH MATERIALS395 citations98
US6620256B1Sep 16, 2003
Non-plasma in-situ cleaning of processing chambers using static flow methods
ADVANCED TECH MATERIALS80 citations98
US6500487B1Dec 31, 2002
Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions
ADVANCED TECH MATERIALS417 citations98
US6617175B1Sep 9, 2003
Infrared thermopile detector system for semiconductor process monitoring and control
ADVANCED TECH MATERIALS70 citations96
US7172918B2Feb 6, 2007
Infrared thermopile detector system for semiconductor process monitoring and control
ADVANCED TECH MATERIALS13 citations92
US7011614B2Mar 14, 2006
Infrared thermopile detector system for semiconductor process monitoring and control
ADVANCED TECH MATERIALS21 citations92
US6821795B2Nov 23, 2004
Infrared thermopile detector system for semiconductor process monitoring and control
ADVANCED TECH MATERIALS24 citations92
US6537353B2Mar 25, 2003
Abatement of effluents from chemical vapor deposition processes using organometallic source reagents
ADVANCED TECH MATERIALS17 citations92
US6391385B1May 21, 2002
Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents
ADVANCED TECH MATERIALS17 citations92
US6716271B1Apr 6, 2004
Apparatus and method for inhibiting decomposition of germane
ADVANCED TECH MATERIALS34 citations89