Inventor
KANEKO MIYAKO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “KANEKO MIYAKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS9953826B2Apr 24, 2018
Substrate cleaning method, substrate cleaning system, and memory medium
TOKYO ELECTRON LTD15 citations92
US10998183B2May 4, 2021
Substrate cleaning apparatus, substrate cleaning system, substrate cleaning method and memory medium
TOKYO ELECTRON LTD2 citations73
US11367630B2Jun 21, 2022
Substrate cleaning method, substrate cleaning system, and memory medium
TOKYO ELECTRON LTD3 citations72
US10835908B2Nov 17, 2020
Substrate processing method
TOKYO ELECTRON LTD2 citations72
US10811283B2Oct 20, 2020
Substrate cleaning method, substrate cleaning system, and memory medium
TOKYO ELECTRON LTD2 citations72
US10392698B2Aug 27, 2019
Film forming method, film forming system and surface processing method
TOKYO ELECTRON LTD2 citations72
US10043652B2Aug 7, 2018
Substrate cleaning method, substrate cleaning system, and memory medium
TOKYO ELECTRON LTD5 citations72
US9799538B2Oct 24, 2017
Substrate cleaning system
TOKYO ELECTRON LTD6 citations72
US12562340B2Feb 24, 2026
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations62
US9443712B2Sep 13, 2016
Substrate cleaning method and substrate cleaning system
TOKYO ELECTRON LTD2 citations62
US10535528B2Jan 14, 2020
Method of forming titanium oxide film and method of forming hard mask
TOKYO ELECTRON LTD0 citations51
US10811264B2Oct 20, 2020
Film-forming method and film-forming apparatus
TOKYO ELECTRON LTD0 citations38