Inventor

TIMMERMANS MARINA

BE5 patents

Patents

5 patents

US10712659B2Jul 14, 2020

Method for forming a carbon nanotube pellicle membrane

IMEC VZW7 citations81

US11092886B2Aug 17, 2021

Method for forming a pellicle

IMEC VZW5 citations70

US11163229B2Nov 2, 2021

Induced stress for EUV pellicle tensioning

IMEC VZW1 citations57

US11599019B2Mar 7, 2023

Method for forming an extreme ultraviolet lithography pellicle

IMEC VZW1 citations56

US11181818B2Nov 23, 2021

Lithography scanner

IMEC VZW0 citations55