Inventor
POLLENTIER IVAN
BE7 patents
⚠️ This page may combine multiple inventors who share the name “POLLENTIER IVAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IMEC VZW
5 patentsUS10712659B2Jul 14, 2020
Method for forming a carbon nanotube pellicle membrane
IMEC VZW7 citations81
US11092886B2Aug 17, 2021
Method for forming a pellicle
IMEC VZW5 citations70
US11163229B2Nov 2, 2021
Induced stress for EUV pellicle tensioning
IMEC VZW1 citations57
US11599019B2Mar 7, 2023
Method for forming an extreme ultraviolet lithography pellicle
IMEC VZW1 citations56
US11181818B2Nov 23, 2021
Lithography scanner
IMEC VZW0 citations55