Inventor
GALLAGHER EMILY
US8 patents
Patents
8 patentsUS10712659B2Jul 14, 2020
Method for forming a carbon nanotube pellicle membrane
IMEC VZW7 citations81
US11092886B2Aug 17, 2021
Method for forming a pellicle
IMEC VZW5 citations70
US10353284B2Jul 16, 2019
Lithographic reticle system
IMEC VZW2 citations69
US10720336B2Jul 21, 2020
Method for manufacturing a mask
IMEC VZW2 citations65
US11163229B2Nov 2, 2021
Induced stress for EUV pellicle tensioning
IMEC VZW1 citations57
US11599019B2Mar 7, 2023
Method for forming an extreme ultraviolet lithography pellicle
IMEC VZW1 citations56
US11181818B2Nov 23, 2021
Lithography scanner
IMEC VZW0 citations55
US11360380B2Jun 14, 2022
Extreme ultraviolet lithography device
IMEC VZW0 citations44