Inventor
Yang chun-fu
TW7 patents
Patents
7 patentsUS11360384B2Jun 14, 2022
Method of fabricating and servicing a photomask
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US12339579B2Jun 24, 2025
Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12169357B2Dec 17, 2024
Method of fabricating and servicing a photomask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11960201B2Apr 16, 2024
Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11714350B2Aug 1, 2023
Method of fabricating and servicing a photomask
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11650493B2May 16, 2023
Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11215918B2Jan 4, 2022
Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62