Inventor
KIM KIKANG
KR5 patents
Patents
5 patentsUS12195855B2Jan 14, 2025
Gas-phase reactor system including a gas detector
ASM IP HOLDING BV0 citations60
US11453946B2Sep 27, 2022
Gas-phase reactor system including a gas detector
ASM IP HOLDING BV0 citations60
US11345999B2May 31, 2022
Method of using a gas-phase reactor system including analyzing exhausted gas
ASM IP HOLDING BV0 citations60
US11814728B2Nov 14, 2023
Method for filling a gap in a three-dimensional structure on a semiconductor substrate
ASM IP HOLDING BV0 citations57
US11251040B2Feb 15, 2022
Cyclical deposition method including treatment step and apparatus for same
ASM IP HOLDING BV1 citations57