Inventor

KIM SEONGRYEONG

KR2 patents

Patents

2 patents

US11814728B2Nov 14, 2023

Method for filling a gap in a three-dimensional structure on a semiconductor substrate

ASM IP HOLDING BV0 citations57

US11251040B2Feb 15, 2022

Cyclical deposition method including treatment step and apparatus for same

ASM IP HOLDING BV1 citations57