Inventor
SHAFIR DROR
IL17 patents
⚠️ This page may combine multiple inventors who share the name “SHAFIR DROR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVA MEASURING INSTR LTD
12 patentsUS10161885B2Dec 25, 2018
Optical phase measurement method and system
NOVA MEASURING INSTR LTD5 citations83
US11029258B2Jun 8, 2021
Optical phase measurement method and system
NOVA MEASURING INSTR LTD2 citations72
US10073045B2Sep 11, 2018
Optical method and system for measuring isolated features of a structure
NOVA MEASURING INSTR LTD2 citations72
US10054423B2Aug 21, 2018
Optical method and system for critical dimensions and thickness characterization
NOVA MEASURING INSTR LTD2 citations72
US10365231B2Jul 30, 2019
Optical phase measurement method and system
NOVA MEASURING INSTR LTD1 citations71
US10876959B2Dec 29, 2020
Method and system for optical characterization of patterned samples
NOVA MEASURING INSTR LTD2 citations70
US10739277B2Aug 11, 2020
Optical system and method for measurements of samples
NOVA MEASURING INSTR LTD2 citations70
US9897553B2Feb 20, 2018
Optical phase measurement method and system
NOVA MEASURING INSTR LTD1 citations61
US10663408B2May 26, 2020
Optical phase measurement system and method
NOVA MEASURING INSTR LTD0 citations51
US10365163B2Jul 30, 2019
Optical critical dimension metrology
NOVA MEASURING INSTR LTD0 citations51
US10041838B2Aug 7, 2018
Optical critical dimension metrology
NOVA MEASURING INSTR LTD0 citations51
US10311198B2Jun 4, 2019
Overlay design optimization
NOVA MEASURING INSTR LTD0 citations41
NOVA LTD
5 patentsUS12467879B2Nov 11, 2025
Optical phase measurement method and system
NOVA LTD0 citations61
US11946875B2Apr 2, 2024
Optical phase measurement system and method
NOVA LTD0 citations61
US11460415B2Oct 4, 2022
Optical phase measurement system and method
NOVA LTD0 citations61
US11885737B2Jan 30, 2024
Method and system for optical characterization of patterned samples
NOVA LTD1 citations59
US11366398B2Jun 21, 2022
Time-domain optical metrology and inspection of semiconductor devices
NOVA LTD0 citations44