Inventor

LEE JOUNG JOO

US41 patents

⚠️ This page may combine multiple inventors who share the name “LEE JOUNG JOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE JOUNG JOO

APPLIED MATERIALS INC

Methods for pre-cleaning conductive interconnect structures

Methods and apparatus for controlling ion fraction in physical vapor deposition processes

Methods and apparatus for controlling ion fraction in physical vapor deposition processes

Methods and apparatus for improved metal ion filtering

Bipolar collimator utilized in a physical vapor deposition chamber

Low resistivity DRAM buried word line stack

Low resistivity DRAM buried word line stack

Methods for igniting a plasma in a substrate processing chamber

Methods and apparatus for forming dual metal interconnects

Low resistivity metal contact stack

Method of depositing metal films

Methods and apparatus for controlling ion fraction in physical vapor deposition processes

Selective oxidation and simplified pre-clean

Methods for processing a substrate using multiple substrate support positions

Methods for copper doped hybrid metallization for line and via

Integrated methods for graphene formation

Methods and apparatus for processing a substrate

Methods and apparatus for semi-dynamic bottom up reflow

Method and apparatus for asymmetric selective physical vapor deposition

Methods and apparatus for forming dual metal interconnects

Electrochemical reduction of surface metal oxides

Methods for removing etch stop layers

Low-k and tantalum nitride barrier recovery using a soak process

Dual silicide process using ruthenium silicide

Film quality control in a linear scan physical vapor deposition process

Methods and apparatus for patterning substrates using asymmetric physical vapor deposition

Gap fill methods using catalyzed deposition

Method of depositing multilayer stack including copper over features of a device structure

Methods and apparatus for patterning substrates using asymmetric physical vapor deposition

Methods for asymmetric deposition of metal on high aspect ratio nanostructures

Methods and apparatus for filling substrate features with cobalt

Methods for pre-cleaning conductive materials on a substrate

Methods and apparatus for processing a substrate

Method of selective metal deposition using separated reactant activation and plasma discharging zone

Low resistivity tungsten film and method of manufacture

Apparatus and method of damage mitigation and step coverage enhancement

Methods for forming cobalt-copper selective fill for an interconnect

FAIRCHILD KR SEMICONDUCTOR LTD

Three-phase BLDC motor system and circuit and method for driving three-phase BLDC motor

SUBRAMANI ANANTHA K

Reflective deposition rings and substrate processing chambers incorporating same

LEE JOUNG JOO

Methods for forming interconnect structures

HA TAE HONG

Methods of forming layers on substrates