Inventor
THOMPSON ERICA J
US8 patents
Patents
8 patentsUS11869891B2Jan 9, 2024
Non-planar integrated circuit structures having mitigated source or drain etch from replacement gate process
INTEL CORP2 citations71
US11563119B2Jan 24, 2023
Etchstop regions in fins of semiconductor devices
INTEL CORP0 citations62
US12302632B2May 13, 2025
Non-planar integrated circuit structures having mitigated source or drain etch from replacement gate process
INTEL CORP0 citations61
US12453115B2Oct 21, 2025
Nanowire transistor structure and method of shaping
INTEL CORP0 citations59
US11869973B2Jan 9, 2024
Nanowire transistor structure and method of shaping
INTEL CORP0 citations59
US9472456B2Oct 18, 2016
Technology for selectively etching titanium and titanium nitride in the presence of other materials
INTEL CORP2 citations57
US11443983B2Sep 13, 2022
Void-free high aspect ratio metal alloy interconnects and method of manufacture using a solvent-based etchant
INTEL CORP0 citations50
US10964800B2Mar 30, 2021
Semiconductor device having fin-end stress-inducing features
INTEL CORP0 citations50